Highlights

General

  • Maximum velocity with linear optics: 1 m/s
  • Reference frequency: 3.4 to 4.0 MHz
  • Weight: 3.4 kg (7.5 lb)
  • Warm up time: 90 minutes

Laser beam

  • Diameter: 6 mm; Option 039: 9 mm & > 300 µW
  • Minimum output power: 180 µW ; Option H01: 300 µW
  • Maximum output power: 1 mW
  • Beam height: 79.5 ± 1.0 mm

Input power requirement

  • +15 V ± 0.3 V at 3.0 A maximum
  • -15 V ± 0.3 V at 0.3 A maximum

Primary uses for the Keysight 5517D include VME- and PC-based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.

Key Specifications

Applications
VME
PC
Keysight 5572A system
Keysight 5501A system
Beam height (mm)
79.5
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
1012
Output power (higher power option available) (�W)
> 180
Reference frequency (MHz)
3.4 to 4.0
Reference frequency
3.4 至 4.0 MHz
Applications
Beam height (mm)
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used
Output power (higher power option available) (�W)
Reference frequency (MHz)
Reference frequency
VME
PC
Keysight 5572A system
Keysight 5501A system
79.5
1012
> 180
3.4 to 4.0
3.4 至 4.0 MHz
View More
Applications:
VME
PC
Keysight 5572A system
Keysight 5501A system
Beam height (mm):
79.5
Max linear velocity - depends on electronics/receivers (mm/s) **E1709A must be used:
1012
Output power (higher power option available) (�W):
> 180
Reference frequency (MHz):
3.4 to 4.0
Reference frequency:
3.4 至 4.0 MHz
Velocity:
1000 mm/s
Warm-up time* if fan is connect to vent body (min):
90
5517D Laser Head

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